Share Email Print

Proceedings Paper

Different noise mechanisms in high-k dielectric gate stacks
Author(s): Zeynep Celik-Butler
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

This is a review paper summarizing the recent reports on low-frequency noise in Metal-Oxide-Semiconductor Field-Effect Transistors (MOSFETs) with high dielectric constant (high-k) gate oxides. Although several such publications have appeared in the literature recently, the only unified theme among them is that the noise in these high-k gate stacks is considerably higher than that observed on conventional SiO2 gate oxide transistors. In addition, interface- and bulk-dielectric trap-induced correlated carrier number and mobility fluctuations (Unified Model) seem to be the commonly accepted cause of these fluctuations. This report attempts to compile the published data, make comparisons between different high-k dielectrics with respect to 1/f noise characteristics and reach preliminary conclusions. Since there is still room for improvement in processing of high-k materials for MOSFET applications, the review represents merely a slice in time of the progress made, and not meant to be a fundamental, theoretical review.

Paper Details

Date Published: 23 May 2005
PDF: 8 pages
Proc. SPIE 5844, Noise in Devices and Circuits III, (23 May 2005); doi: 10.1117/12.611250
Show Author Affiliations
Zeynep Celik-Butler, Univ. of Texas at Arlington (United States)

Published in SPIE Proceedings Vol. 5844:
Noise in Devices and Circuits III
Alexander A. Balandin; Francois Danneville; M. Jamal Deen; Daniel M. Fleetwood, Editor(s)

© SPIE. Terms of Use
Back to Top