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Proceedings Paper

Efficient topology and design methodology for RF MEMS switches
Author(s): B. Ducarouge; D. Dubuc; S. Melle; K. Grenier; L. Mazenq; L. Bary; R. Plana
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Paper Abstract

We present an original RF-MEMS switch topology associated with an efficient design methodology. The proposed switch has been optimized thank to a scalable electrical model, fabricated and measured and exhibits isolations better than -23 dB and losses less than 0.25 dB at 24 GHz for a pull down voltage of 22V. The proposed topology and design methodology can then be efficiently used to optimize more complex RF-MEMS with enhanced microwave performances.

Paper Details

Date Published: 1 July 2005
PDF: 5 pages
Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); doi: 10.1117/12.609396
Show Author Affiliations
B. Ducarouge, LAAS-CNRS (France)
D. Dubuc, LAAS-CNRS (France)
S. Melle, LAAS-CNRS (France)
K. Grenier, LAAS-CNRS (France)
L. Mazenq, LAAS-CNRS (France)
L. Bary, LAAS-CNRS (France)
R. Plana, LAAS-CNRS (France)

Published in SPIE Proceedings Vol. 5836:
Smart Sensors, Actuators, and MEMS II
Carles Cane; Jung-Chih Chiao; Fernando Vidal Verdu, Editor(s)

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