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Proceedings Paper

Large-signal model of a resonating cantilever-based transducer for system level electrical simulation
Author(s): Jaume Verd; Jordi Teva; Gabriel Abadal; Francesc Perez-Murano; Jaume Esteve; Nuria Barniol
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Paper Abstract

In this work, we present a non-linear electromechanical model of an electrostatically excited cantilever that can be used to perform system level electrical simulations. This model is implemented by using an analog hardware description language (VHDL-AMS) that allows its use in a common IC CAD environment like CADENCE. Small-signal and large-signal simulations are performed and the results are compared with a simple linear model (RLC//C) showing the benefits of this model. This model is validated by its fit with the experimental results obtained from a monolithic sub-micrometer cantilever based sensor

Paper Details

Date Published: 1 July 2005
PDF: 9 pages
Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); doi: 10.1117/12.608462
Show Author Affiliations
Jaume Verd, Univ. Autonoma de Barcelona (Spain)
Jordi Teva, Univ. Autonoma de Barcelona (Spain)
Gabriel Abadal, Univ. Autonoma de Barcelona (Spain)
Francesc Perez-Murano, Institut de Microelectronica de Barcelona (Spain)
Jaume Esteve, Institut de Microelectronica de Barcelona (Spain)
Nuria Barniol, Univ. Autonoma de Barcelona (Spain)

Published in SPIE Proceedings Vol. 5836:
Smart Sensors, Actuators, and MEMS II
Carles Cane; Jung-Chih Chiao; Fernando Vidal Verdu, Editor(s)

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