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Proceedings Paper

Fabrication of three-dimensional structures by micro stereolithography for electromagnetic absorber applications
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Paper Abstract

In this paper, microstereolithography (MSL) is introduced to fabricate a sophisticated 3D objects in micro size such as hollow pyramidal and helical structures, which are used for electromagnetic absorber applications. The hollow helix can be constructed by staking a hundred layers of 2D annuluses, taking a slight angular increment for the each layer. It is expected that the helices that has ferromagnetic nanoparticle incursions show improve the performance of the electromagnetic absorbers consisting of helix arrays. The paper also presents a new approach to combine the MSL with conventional silicon micromachining process by demonstrating MEMS bridge structures.

Paper Details

Date Published: 16 May 2005
PDF: 7 pages
Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); doi: 10.1117/12.608130
Show Author Affiliations
Taeksoo Ji, Univ. of Arkansas (United States)
Vijay K. Varadan, Univ. of Arkansas (United States)

Published in SPIE Proceedings Vol. 5763:
Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
Vijay K. Varadan, Editor(s)

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