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Proceedings Paper

Numerical analysis of pull-in voltage for contact MEMS switches in switched-line phase shifter application
Author(s): Ling Jiang; Yanling Shi; Wei Li; Yanfang Ding; Zongshen Lai; Ziqiang Zhu
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Paper Abstract

This paper presents numerical analysis of pull-in voltage for contact microelectromechanical (MEMS) switch in switched-line phase shifter application. The contact MEMS switch consists of a fixed-fixed thin metal membrane called the “bridge” suspended over a broken center conductor of coplanar waveguide (CPW). The center conductor sandwiched by a pair of symmetrical off-center drive capacitors that form two electrostatic actuators. A lumped-model for two coupled parallel-plates actuators is applied to describe the electromechanical behavior and the pull-in phenomenon in the contact MEMS switch. And a static mechanical model including the residual stress effects is developed to provide the effective stiffness coefficient for the prediction of pull-in voltage in a contact MEMS switch with uniform bridge width. As a theoretical basis, lower pull-in voltage can be achieved by optimizations on structure and material of bridge.

Paper Details

Date Published: 8 December 2004
PDF: 4 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607900
Show Author Affiliations
Ling Jiang, East China Normal Univ. (China)
Yanling Shi, East China Normal Univ. (China)
Wei Li, East China Normal Univ. (China)
Yanfang Ding, East China Normal Univ. (China)
Zongshen Lai, East China Normal Univ. (China)
Ziqiang Zhu, East China Normal Univ. (China)

Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications
Junhao Chu; Zongsheng Lai; Lianwei Wang; Shaohui Xu, Editor(s)

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