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Proceedings Paper

CMOS integrator based lock-in pixel for heterodyne interferometry
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Paper Abstract

This article presents a prototype of a CMOS phase sensor for high accuracy (1 Angstrom) heterodyne interferometry. Switched integrators realization of a lock-in pixel for 4-bucket phase detection algorithm is described and illustrated by experimental results. Factors that limit the accuracy of this implementation and possible ways for its improvement are discussed.

Paper Details

Date Published: 30 June 2005
PDF: 8 pages
Proc. SPIE 5837, VLSI Circuits and Systems II, (30 June 2005); doi: 10.1117/12.607728
Show Author Affiliations
Oleg Soloviev, Technische Univ. Delft (Netherlands)
Gleb Vdovin, Technische Univ. Delft (Netherlands)

Published in SPIE Proceedings Vol. 5837:
VLSI Circuits and Systems II
Jose Fco. Lopez; Francisco V. Fernandez; Jose Maria Lopez-Villegas; Jose M. de la Rosa, Editor(s)

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