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Proceedings Paper

The preparation of the single-phase perovskite conductive LaNiO3 films on different substrates
Author(s): Jian-Kang Li; Xi Yao; Liangying Zhang
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Paper Abstract

LaNiO3 thin films were deposited on Si (100) and Pt(111)/Ti/SiO2/Si substrates by a modified metalorganic decomposition technique and rapid thermal annealing method. The structures of the films were characterized by x-ray diffraction (XRD). XRD analysis show that the LaNiO3 thin films on Si (100) and Pt(111)/Ti/SiO2/Si substrates possess single-phase perovskite-type structure and highly (100)-oriented. Scanning electron microscope (SEM) and atom force microscopy (AFM) image show the LaNiO3 films with uniform and crack-free surfaces. The resisitivity vs. temperature and thickness curves of the LaNiO3 films showed that the films possessed good metallic character.

Paper Details

Date Published: 8 December 2004
PDF: 4 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607561
Show Author Affiliations
Jian-Kang Li, Xi'an Jiaotong Univ. (China)
Xi Yao, Xi'an Jiaotong Univ. (China)
Tongji Univ. (China)
Liangying Zhang, Tongji Univ. (China)

Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications
Junhao Chu; Zongsheng Lai; Lianwei Wang; Shaohui Xu, Editor(s)

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