Proceedings Paper
Deposition and characterizations of GeCN thin films| Format | Member Price | Non-Member Price |
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Paper Abstract
Germanium-carbon-nitride (GeCN) thin films were deposited on different substrates by reactive magnetic co-sputtering. As-deposited films were characterized with respect to composition, microstructure, and optical relection. The results show that quality of the film deposited on ZrN substrate is better and the band gaps is about 3.4 eV.
Paper Details
Date Published: 8 December 2004
PDF: 4 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607463
Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications
Junhao Chu; Zongsheng Lai; Lianwei Wang; Shaohui Xu, Editor(s)
PDF: 4 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607463
Show Author Affiliations
Fuchun Xu, Xiamen Univ. (China)
Jun Yong Kang, Xiamen Univ. (China)
Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications
Junhao Chu; Zongsheng Lai; Lianwei Wang; Shaohui Xu, Editor(s)
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