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Proceedings Paper

The second law of thermodynamics for advanced thin films
Author(s): Ji-Tao Wang; David Wei Zhang; Wei-Feng Yu
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Paper Abstract

In recent years, many advanced thin films had been successfully prepared under activated nonequilibrium conditions. However, based on classical thermodynamics the low-pressure diamond synthesis had been regarded as violating the second law of thermodynamics. After removing the “bug” hidden in classical concepts of thermodynamics, a new field of modern thermodynamics, nonequilibrium nondissipative thermodynamics, emerges in the equality part of the second law. The new progress in the second law of thermodynamics provides a firm theoretical base of calculating nonequilibrium phase diagrams for advanced thin films. Thermodynamic coupling in these systems has been discussed from both sides in physics and in mathematics. Our coupling model for diamond films growth was cited in the Journal Nature with a nice comment.

Paper Details

Date Published: 8 December 2004
PDF: 6 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607267
Show Author Affiliations
Ji-Tao Wang, Fudan Univ. (China)
David Wei Zhang, Fudan Univ. (China)
Wei-Feng Yu, Fudan Univ. (China)

Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications
Junhao Chu; Zongsheng Lai; Lianwei Wang; Shaohui Xu, Editor(s)

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