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Proceedings Paper

High-Q micro-machined piezoelectric mechanical filters using coupled cantilever beams
Author(s): Meiling Zhu; Paul B. Kirby
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Paper Abstract

A new structure for micro-machined piezoelectric mechanical filters with high-Q is presented. The structure is composed of two silicon cantilevers which have thin film PZT transducers deposited on top of each and are mechanically connected together by a silicon linkage. A model is proposed in which finite element analysis (FEA) is combined with a two-port microwave network representation to show high-Q characteristics. Using the model, key parameters in the design include the substrate thickness, and the position, length and width of the linkage, and the effect of these on filter performance, including the resonant frequencies of the in-phase and out-of-phase vibrational modes, bandwidth, quality factor (Q), insertion loss and ripple are also investigated. The results show that the coupling produces additional resonances compared with ladder type filters composed of uncoupled cantilevers, and a significant increase in Q of about a few hundred times higher with correct design, than uncoupled cantilevers.

Paper Details

Date Published: 1 July 2005
PDF: 11 pages
Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); doi: 10.1117/12.607248
Show Author Affiliations
Meiling Zhu, Cranfield Univ. (United Kingdom)
Paul B. Kirby, Cranfield Univ. (United Kingdom)

Published in SPIE Proceedings Vol. 5836:
Smart Sensors, Actuators, and MEMS II
Carles Cane; Jung-Chih Chiao; Fernando Vidal Verdu, Editor(s)

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