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Proceedings Paper

Polymeric waveguide design of a 2D scanner
Author(s): Reynold Panergo; Chao-Shih Liu; Benjamin Estroff; Wei-Chih Wang
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Paper Abstract

Presented here is the optical characterization and 2D scanning capabilities of an SU-8 based waveguide scanner. Transducing a resonant microcantilever in both the vertical and horizontal direction provides a raster motion useful for imaging when in combination with light source and detector. An application of this design can be in the area of endoscopy where noninvasive instrumentation is desired. MEMS fabricated polymeric devices will allow reduction of the overall size of the system while maintaining the resolution and field-of-view (FOV) of current endoscopes. Our design provides the initial phases for the realization of this system. A waveguide scanner has been fabricated with a 50x100mm cross section and beam length of 2mm. Mode coupling from input to output of the structural design has been determined to be 71.4%. Total power output measured experimentally to be 20%. Preliminary tests have shown 2D imaging with digital processed reconstruction.

Paper Details

Date Published: 9 May 2005
PDF: 11 pages
Proc. SPIE 5768, Health Monitoring and Smart Nondestructive Evaluation of Structural and Biological Systems IV, (9 May 2005); doi: 10.1117/12.607003
Show Author Affiliations
Reynold Panergo, Univ. of Washington (United States)
Chao-Shih Liu, Univ. of Washington (United States)
Benjamin Estroff, Univ. of Washington (United States)
Wei-Chih Wang, Univ. of Washington (United States)

Published in SPIE Proceedings Vol. 5768:
Health Monitoring and Smart Nondestructive Evaluation of Structural and Biological Systems IV
Tribikram Kundu, Editor(s)

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