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Proceedings Paper

A novel polishing head with a gimbals-like structure for the high-speed polishing process
Author(s): Hocheol Lee; Namyoung Lee; Changkyu Song; Husang Lee; Youngjae Shin; Chunhong Park
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Paper Abstract

In this paper, we suggest a polishing head with a mechanical gimbals-like structure for the optics fabrication. In the small tool polishing processes, several types of polishing mechanism have been tried to get more deterministic and high efficient optical fabrication. The conventional polishing processes to use the contacting pad material of polyurethane or pitch need the higher polishing rate to shorten the overall polishing time for large optics. Therefore, new polishing head mechanism is designed to use the air backpressure and gimbals-like hinge structure to increase polishing velocity. In the following experiment, mechanical adaptability was confirmed both on the flat glass and the convex aluminum surface.

Paper Details

Date Published: 2 May 2005
PDF: 3 pages
Proc. SPIE 10315, Optifab 2005: Technical Digest, 103150Q (2 May 2005); doi: 10.1117/12.605813
Show Author Affiliations
Hocheol Lee, Hanbat National Univ. (South Korea)
Namyoung Lee, Hanbat National Univ. (South Korea)
Changkyu Song, Korea Institute of Machinery and Materials (South Korea)
Husang Lee, Korea Institute of Machinery and Materials (South Korea)
Youngjae Shin, Korea Institute of Machinery and Materials (South Korea)
Chunhong Park, Korea Institute of Machinery and Materials (South Korea)

Published in SPIE Proceedings Vol. 10315:
Optifab 2005: Technical Digest
Robert E. Fischer; Masahide Katsuki; Matthias Pfaff; Kathleen A. Richardson, Editor(s)

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