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Proceedings Paper

HyDra: A novel hydrodynamic polishing tool for high quality optical surfaces
Author(s): Erika Sohn; Elfego Ruiz; Esteban Luna; Luis Salas; Manuel Nunez; Jorge Valdes; Benjamin Martinez; Irene Cruz-Gonzalez
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Paper Abstract

A novel hydrodynamic radial polishing tool (HyDRa) is presented. It performs corrective lapping and fine polishing of diverse materials by means of a low-cost abrasive flux and a hydrostatic suspension system that avoids contact of the tool with the working surface. With this tool it is currently possible to polish aspheres and free-form optics of up to 2.5 meters in diameter. It has the advantage of avoiding fallen edges during the polishing process as well as reducing tool wear out and deformation. The functioning principle is based on the generation of a high-velocity, high-pressure abrasive emulsion flux with radial geometry. The polishing process is repeatable and achieves high degrees of precision and accuracy on optical and semiconductor surfaces. An additional advantage of this new tool is the possibility to perform in-process interferometric measurements. Recent results of polished aspheres are discussed.

Paper Details

Date Published: 2 May 2005
PDF: 3 pages
Proc. SPIE 10315, Optifab 2005: Technical Digest, 1031504 (2 May 2005); doi: 10.1117/12.605753
Show Author Affiliations
Erika Sohn, Univ. Nacional Autonoma de Mexico (Mexico)
Elfego Ruiz, Univ. Nacional Autonoma de Mexico (Mexico)
Esteban Luna, Univ. Nacional Autonoma de Mexico (Mexico)
Luis Salas, Univ. Nacional Autonoma de Mexico (Mexico)
Manuel Nunez, Univ. Nacional Autonoma de Mexico (Mexico)
Jorge Valdes, Univ. Nacional Autonoma de Mexico (Mexico)
Benjamin Martinez, Univ. Nacional Autonoma de Mexico (Mexico)
Irene Cruz-Gonzalez, Univ. Nacional Autonoma de Mexico (Mexico)

Published in SPIE Proceedings Vol. 10315:
Optifab 2005: Technical Digest
Robert E. Fischer; Masahide Katsuki; Matthias Pfaff; Kathleen A. Richardson, Editor(s)

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