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Proceedings Paper

Line end design intent estimation using curves
Author(s): Chi-Yuan Hung; Gensheng Gao; Steven Zhang; Ze-Xi Deng; Christopher Cork; Lawrence S. Melvin III; Yan Jiang
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Paper Abstract

Semiconductor foundries need to have a single, standard mask preparation procedure to deal with the large number of designs they receive. This data is typically of two sorts; the random logic over which they have little control of how the design intent is represented; and cells from dense arrays such as memory, often with design rule violations, whose OPC correction needs to be precisely optimized to achieve best yield and device performance. Occasionally the input data will contain sub-resolvable notches and extensions, which while not violating DRC specifications, would, if filled, result in DRC violations. This may be due to a non DFM aware automated layout tool, or a designer aggressively trying to minimize circuit density. In practice it is worthwhile to clean up these notches to ease OPC correction. Doing this should not result in printability errors as these notches typically represent a more complex curved design intent that cannot be accurately represented due to the restrictions imposed by the limited number of polygon edge directions available for layout. Similarly, memory cell layouts often have significant implied curvature. These may only be corrected properly if the OPC target point is defined precisely for each individual segment. In general, letting the OPC correction engine correct a layout defined by a realistic, curved target shape gives better quality corrections with greater process window. The challenge for the OPC engineer working in a foundry is therefore to determine a clean-up methodology for incoming data and to correctly apply the design intent, where necessary, from the original pre-cleanup data. A programmable OPC engine gives the user flexibility in optimizing the set of rules embedded in the OPC cleanup and correction recipes. These embed within them the algorithms to interpret the rounding on the desired silicon image not only for line-ends and corners of random logic but also the more complex curved silicon images and tolerances required by memory cells.

Paper Details

Date Published: 5 May 2005
PDF: 6 pages
Proc. SPIE 5756, Design and Process Integration for Microelectronic Manufacturing III, (5 May 2005); doi: 10.1117/12.604526
Show Author Affiliations
Chi-Yuan Hung, SMIC Shanghai (China)
Gensheng Gao, SMIC Shanghai (China)
Steven Zhang, SMIC Shanghai (China)
Ze-Xi Deng, SMIC Shanghai (China)
Christopher Cork, Synopsys Inc. (United States)
Lawrence S. Melvin III, Synopsys Inc. (United States)
Yan Jiang, Synopsys Inc. (United States)

Published in SPIE Proceedings Vol. 5756:
Design and Process Integration for Microelectronic Manufacturing III
Lars W. Liebmann, Editor(s)

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