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Proceedings Paper

Optically addressed MEMS driven with high-frequency modulated light
Author(s): Jed Khoury; Charles L. Woods; Bahareh Haji-Saeed; John Kierstead
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Paper Abstract

In this paper we propose a new operational mechanism for an optically addressed deformable mirror device. The device consists of a pixilated metallized membrane mirror supported above an optically addressed photoconductive substrate. A conductive transparent conductive electrode is deposited on the backside of the substrate. A DC bias is applied between the membrane and the back electrode of the device accompanied with very high frequency modulated light. The membrane is deformed when light is shone from the backside of the device. This occurs due to impedance and bias redistribution between the two cascaded impedances.

Paper Details

Date Published: 28 March 2005
PDF: 8 pages
Proc. SPIE 5816, Optical Pattern Recognition XVI, (28 March 2005); doi: 10.1117/12.604207
Show Author Affiliations
Jed Khoury, Air Force Research Lab./SNHC (United States)
Charles L. Woods, Air Force Research Lab./SNHC (United States)
Bahareh Haji-Saeed, Univ. of Massachusetts/Lowell (United States)
John Kierstead, Solid State Scientific Corp. (United States)

Published in SPIE Proceedings Vol. 5816:
Optical Pattern Recognition XVI
David P. Casasent; Tien-Hsin Chao, Editor(s)

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