Torsion micro-mirror is the key structure of MEMS optical devices such as MEMS optical switches, MEMS variable optical attenuator, MEMS scanning micro-mirror array and so on. In this paper, after testing a silicon-based non-silicon micro-mirror fabricated by bulk micromachining, some important measurement data has been achieved. It is clear that this silicon-based non-silicon micro-mirror scheme can has just less than 15 degree rotation at 20V driving voltage while the beam thickness is just 0.5 m m . In order to improving the stability, reliability and optical properties of the micro-mirror, a new scheme has been put forward and the fabricating process using surface-micromachining has been simulated. It is shown that the new scheme will improve the characteristics of the micro-mirror effectively.

Date Published: 3 June 2005
PDF: 8 pages
Proc. SPIE 5825, Opto-Ireland 2005: Optoelectronics, Photonic Devices, and Optical Networks, (3 June 2005); doi: 10.1117/12.603190

Published in SPIE Proceedings Vol. 5825:
Opto-Ireland 2005: Optoelectronics, Photonic Devices, and Optical Networks
John Gerard McInerney; Harold S. Gamble; Gerald Farrell; David M. Denieffe; Padraig Hughes; R. Alan Moore; Liam Barry, Editor(s)