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Proceedings Paper

Analysis of a nonuniform cantilever beam MOEM accelerometer under closed loop operation
Author(s): A. Selvarajan; Jagannath Nayak; T. Srinivas; D. V. K. Sastry
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Paper Abstract

In this paper, we propose a closed loop Micro-Opto-Electro-Mechanical (MOEM) accelerometer employing a nonuniform cantilever beam and an Anti Resonant Reflecting Optical Waveguide (ARROW) on silicon. The MOEM acelerometer consists of a Mach Zehnder Intereferometer (MZI) and an electro-elasto-optic phase modulator to nullify the acceleration induced phase change so as to make the device work in closed loop form. It is shown that MOEM accelerometers with noise equivalent acceleration of 0.255 μg/√Hz, a dynamic range of 160g, scale factor stability of 1.57 ppm/°C and shock survivability of more than 1000 g is feasible.

Paper Details

Date Published: 16 May 2005
PDF: 8 pages
Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); doi: 10.1117/12.602707
Show Author Affiliations
A. Selvarajan, Indian Institute of Science (India)
Jagannath Nayak, Research Ctr. Imarat (India)
T. Srinivas, Indian Institute of Science (India)
D. V. K. Sastry, Research Ctr. Imarat (India)

Published in SPIE Proceedings Vol. 5763:
Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
Vijay K. Varadan, Editor(s)

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