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Proceedings Paper

A new electron beam-addressed reflective spatial light modulator and projection system for HWIL scene generation
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Paper Abstract

We successfully fabricated two lots of micromirror devices. Each device consisted of a fused silica substrate, a substrate grid layer, a micromirror array layer, a dielectric membrane layer, and a top electrode layer (patterned with collector grid and vent hole only). Each micromirror array contained 1920×1536 mirrors, corresponding to resolution of 1920×1536. The process approach was repeatable, and reliable. Optical microscopy showed that the micromirrors were suspended above the glass panel by mirror post regions. The membrane was suspended above the substrate panel and above the array of micromirrors by membrane post regions. Micromirrors were flat and clean.

Paper Details

Date Published: 20 May 2005
PDF: 13 pages
Proc. SPIE 5785, Technologies for Synthetic Environments: Hardware-in-the-Loop Testing X, (20 May 2005); doi: 10.1117/12.602150
Show Author Affiliations
Yin Liu, LW Microsystems, Inc. (United States)
Christian Gutleben, LW Microsystems, Inc. (United States)

Published in SPIE Proceedings Vol. 5785:
Technologies for Synthetic Environments: Hardware-in-the-Loop Testing X
Robert Lee Murrer Jr., Editor(s)

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