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Proceedings Paper

Light scattering of highest damage resistant fluoride HR coating for KrF laser
Author(s): Takao Izawa; R. Uchimura; N. Yamamura; T. Yakuoh; Yoshiro Owadano; Yuji Matsumoto; M. Yano
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Paper Abstract

Fluoride HR coatings consisting of middle and low refractive index fluorides often show a higher damage threshold than oxide coatings in the UV range. However, the light scattering level of fluoride HR coatings tend to be higher than oxide ones. In this study, the scattering and surface roughness of fluoride HR coatings for KrF laser were investigated, and also compared with those of oxide HR coatings using Al2O3 as high index materials.

Paper Details

Date Published: 29 July 1992
PDF: 10 pages
Proc. SPIE 1624, Laser-Induced Damage in Optical Materials: 1991, (29 July 1992); doi: 10.1117/12.60132
Show Author Affiliations
Takao Izawa, Showa Optical Co., Ltd. (Japan)
R. Uchimura, Showa Optical Co., Ltd. (Japan)
N. Yamamura, Showa Optical Co., Ltd. (Japan)
T. Yakuoh, Showa Optical Co., Ltd. (Japan)
Yoshiro Owadano, Electrotechnical Lab. (Japan)
Yuji Matsumoto, Electrotechnical Lab. (Japan)
M. Yano, Electrotechnical Lab. (Japan)

Published in SPIE Proceedings Vol. 1624:
Laser-Induced Damage in Optical Materials: 1991
Harold E. Bennett; Lloyd L. Chase; Arthur H. Guenther; Brian Emerson Newnam; M. J. Soileau, Editor(s)

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