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Proceedings Paper

Near-angle transmission scattering in excimer laser components
Author(s): David T. Sheerin; David C. Emmony; Chris J. Hooker; Ian N. Ross; M. J. Shaw
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Paper Abstract

Results are presented for preliminary investigations into the way optical elements that are exposed to corrosive environments exhibit an increase in transmissive scatter the longer that such exposure exists. Near angle (i.e. < 1 degree(s)) scatter data is presented for fused silica substrates exposed to fluorine atmospheres of differing concentrations. The fluorine reacts with any water vapor present to form hydrofluoric acid which etches materials such as silica. The scatter probe wavelength used was 633 nm and scattering angles from 4 to 15 mR studied. Results are presented in bidirectional transmission distribution function (BTDF) format as well as photographs of the resulting diffraction patterns arising from passing a HeNe laser beam through the bulk of the sample which seem to show a periodic roughness profile. It is suggested that surface cleaning prior to exposure provides seeding sites, or micro scratches, for preferential attack by hydrofluoric acid.

Paper Details

Date Published: 29 July 1992
PDF: 7 pages
Proc. SPIE 1624, Laser-Induced Damage in Optical Materials: 1991, (29 July 1992); doi: 10.1117/12.60106
Show Author Affiliations
David T. Sheerin, Loughborough Univ. of Technology (United Kingdom)
David C. Emmony, Loughborough Univ. of Technology (United Kingdom)
Chris J. Hooker, Rutherford Appleton Lab. (United Kingdom)
Ian N. Ross, Rutherford Appleton Lab. (United Kingdom)
M. J. Shaw, Rutherford Appleton Lab. (United Kingdom)

Published in SPIE Proceedings Vol. 1624:
Laser-Induced Damage in Optical Materials: 1991
Harold E. Bennett; Lloyd L. Chase; Arthur H. Guenther; Brian Emerson Newnam; M. J. Soileau, Editor(s)

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