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Proceedings Paper

Liquid metal micro-droplet generator for laser produced plasma target delivery used in an extreme ultra-violet source
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Paper Abstract

The implementation of a Laser Produced Plasma Extreme Ultra-Violet (LPP EUV) source requires a high-power laser focused onto a target. In order to minimize the required laser input power the target material must have a high conversion efficiency to 13.5 nanometer radiation. Ideally, a pulsed laser is used and the target should be delivered in small uniform volumes to a point in space at high repetition rates. The small volumes minimize the amount of debris, the high repetition rates enable higher power systems and the free space delivery alleviates thermal issues and allows large collection angles. It has been demonstrated that lithium and tin have very high conversion efficiencies and system solutions exist to use these materials. In this paper we describe the requirements and performance of a liquid metal micro-droplet target generator capable of dispensing both lithium and tin. Finally it is shown that the current generator performance is sufficient to support stable source operation.

Paper Details

Date Published: 6 May 2005
PDF: 7 pages
Proc. SPIE 5751, Emerging Lithographic Technologies IX, (6 May 2005); doi: 10.1117/12.601045
Show Author Affiliations
J. Martin Algots, Cymer Inc. (United States)
Oscar Hemberg, Cymer Inc. (United States)
Alexander Bykanov, Cymer Inc. (United States)

Published in SPIE Proceedings Vol. 5751:
Emerging Lithographic Technologies IX
R. Scott Mackay, Editor(s)

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