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Proceedings Paper

Effects of high moisture on the purification of clean compressed air
Author(s): Joe Rotter; Daniel Alvarez Jr.; Allan Tram
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Paper Abstract

A method was developed to measure purifier siloxane removal efficiencies from air under dry and humid conditions. This method measured hydrocarbons to 1 part-per-trillion (ppt) concentration levels with a Gas Chromatograph and Flame Ionization Detector (GC/FID). Several media types were examined: Activated Alumina (AA), Activated Carbon (AC), Bead-shaped Activated Carbon (BAC), a Proprietary Inorganic Material (PIM) and a Zeolite (ZEO). Under dry conditions, all five materials removed the siloxane challenge to below 1ppt. Under humid conditions the AC material had a removal efficiency of 286 ppt. The AA, BAC, PIM and ZEO removed the siloxane challenge to below 1 ppt under humid conditions. After media saturation was reached, the materials were regenerated and siloxane removal efficiencies were re-examined. Under humid conditions only the AA, PIM and ZEO materials were regenerable to below 1ppt efficiency levels.

Paper Details

Date Published: 10 May 2005
PDF: 6 pages
Proc. SPIE 5752, Metrology, Inspection, and Process Control for Microlithography XIX, (10 May 2005); doi: 10.1117/12.601035
Show Author Affiliations
Joe Rotter, Mykrolis Corp. (United States)
Daniel Alvarez Jr., Mykrolis Corp. (United States)
Allan Tram, Mykrolis Corp. (United States)

Published in SPIE Proceedings Vol. 5752:
Metrology, Inspection, and Process Control for Microlithography XIX
Richard M. Silver, Editor(s)

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