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Proceedings Paper

Block-copolymerized polyimides for optical waveguides
Author(s): Taro Itatani; Sucheta Gorwadkar; Akinori Shiotani; Masahiro Igusa; Kenji Yonei; Joji Maeda; Hiroshi Itatani
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Paper Abstract

We have developed polyimides for optical waveguide synthesized by block-copolymerization method. We demonstrated the optical waveguide with rather low refractive indices. Lower refractive indices make larger waveguide size and easier coupling to optical fibers. We applied polyimides with lower refractive indices with a fluorinated polyimide for the clad and polyimide of dedrimer structures for core. The refractive indices are precisely controlled as 0.01 by thermal conditions. This core polyimide has patterned by i-line process and formed optical waveguide.

Paper Details

Date Published: 4 May 2005
PDF: 10 pages
Proc. SPIE 5753, Advances in Resist Technology and Processing XXII, (4 May 2005); doi: 10.1117/12.600190
Show Author Affiliations
Taro Itatani, National Institute of Advanced Science and Technology (Japan)
Sucheta Gorwadkar, National Institute of Advanced Science and Technology (Japan)
Akinori Shiotani, PI R&D Co. (Japan)
Masahiro Igusa, Shibaura Institute of Technology (Japan)
Kenji Yonei, Shibaura Institute of Technology (Japan)
Joji Maeda, Tokyo Univ. of Science (Japan)
Hiroshi Itatani, PI R&D Co. (Japan)

Published in SPIE Proceedings Vol. 5753:
Advances in Resist Technology and Processing XXII
John L. Sturtevant, Editor(s)

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