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Proceedings Paper

Robust control of electrostatic torsional micromirrors using adaptive sliding-mode control
Author(s): Harshad S. Sane; Navid Yazdi; Carlos H. Mastrangelo
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Paper Abstract

This paper presents high-resolution control of torsional electrostatic micromirrors beyond their inherent pull-in instability using robust sliding-mode control (SMC). The objectives of this paper are two-fold - firstly, to demonstrate the applicability of SMC for MEMS devices; secondly - to present a modified SMC algorithm that yields improved control accuracy. SMC enables compact realization of a robust controller tolerant of device characteristic variations and nonlinearities. Robustness of the control loop is demonstrated through extensive simulations and measurements on MEMS with a wide range in their characteristics. Control of two-axis gimbaled micromirrors beyond their pull-in instability with overall 10-bit pointing accuracy is confirmed experimentally. In addition, this paper presents an analysis of the sources of errors in discrete-time implementation of the control algorithm. To minimize these errors, we present an adaptive version of the SMC algorithm that yields substantial performance improvement without considerably increasing implementation complexity.

Paper Details

Date Published: 22 January 2005
PDF: 12 pages
Proc. SPIE 5719, MOEMS and Miniaturized Systems V, (22 January 2005); doi: 10.1117/12.600083
Show Author Affiliations
Harshad S. Sane, United Technologies Research Ctr. (United States)
Navid Yazdi, Univ. of Michigan (United States)
Carlos H. Mastrangelo, Corning Inc. (United States)

Published in SPIE Proceedings Vol. 5719:
MOEMS and Miniaturized Systems V
Ayman El-Fatatry, Editor(s)

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