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Proceedings Paper

Fabrication of optical microstructures through fractional Talbot imaging
Author(s): T. J. Suleski; Y.-C. Chuang; P. C. Deguzman; R. A. Barton
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Paper Abstract

Interference in the Fresnel regime of periodic structures creates a wide variety of intricate diffraction patterns. The diffraction patterns from both amplitude and phase gratings can bear a strong resemblance to the grating itself, or have much more complex structures. In this paper, we discuss a general approach for using interference patterns from amplitude gratings for lithographic fabrication of optical microstructures. We address the generation of the interference patterns from the standpoint of Talbot self-imaging. This approach enables the realization of complex optical structures with a single exposure in an appropriate fractional Talbot plane. Design approaches are discussed, and both theoretical and experimental results are presented.

Paper Details

Date Published: 22 January 2005
PDF: 8 pages
Proc. SPIE 5720, Micromachining Technology for Micro-Optics and Nano-Optics III, (22 January 2005); doi: 10.1117/12.599125
Show Author Affiliations
T. J. Suleski, Univ. of North Carolina/Charlotte (United States)
Y.-C. Chuang, Univ. of North Carolina/Charlotte (United States)
P. C. Deguzman, Univ. of North Carolina/Charlotte (United States)
R. A. Barton, Univ. of North Carolina/Charlotte (United States)


Published in SPIE Proceedings Vol. 5720:
Micromachining Technology for Micro-Optics and Nano-Optics III
Eric G. Johnson; Gregory P. Nordin; Thomas J. Suleski, Editor(s)

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