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Proceedings Paper

Piezoresistive sensor design using topology optimization
Author(s): Emilio Carlos Nelli Silva; Bernardo Reis Dreyer de Souza; Shinji Nishiwaki
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Paper Abstract

Piezoresistive materials, materials whose resistivity properties change when subjected to a mechanical stresses, currently have wide industry application for building MEMS, such as, pressure sensors, accelerometers, inclinometers, and load cells. A basic piezoresistive sensor consists of piezoresistive material bonded to a flexible structure, such as a cantilever, membrane, or compliant mechanism, where the flexible structure transfers pressure, force, or inertial force (due to acceleration), thereby causing a stress that changes the resistivity of the piezoresistive material. By applying a voltage to the material, its resistivity can be measured and correlated with the degree of applied pressure or force. The performance of the piezoresistive sensor is closely related to the design of its flexible structure which can be achieved by applying systematic design methods, such as topology optimization. Thus, in this work, a topology optimization formulation has been applied to the design of piezoresistive sensors. As an initial problem, a piezoresistive force sensor design is considered. The optimization problem is posed as the design of a flexible structure that bonded to the piezoresistive material generates the maximum response in terms of resistivity change (or output voltage) when a force is applied.

Paper Details

Date Published: 19 May 2005
PDF: 12 pages
Proc. SPIE 5757, Smart Structures and Materials 2005: Modeling, Signal Processing, and Control, (19 May 2005); doi: 10.1117/12.599101
Show Author Affiliations
Emilio Carlos Nelli Silva, Univ. de Sao Paulo (Brazil)
Bernardo Reis Dreyer de Souza, Univ. de Sao Paulo (Brazil)
Shinji Nishiwaki, Kyoto Univ. (Japan)

Published in SPIE Proceedings Vol. 5757:
Smart Structures and Materials 2005: Modeling, Signal Processing, and Control
Ralph C. Smith, Editor(s)

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