Proceedings Paper
Optical 3D monitoring VLSI structures| Format | Member Price | Non-Member Price |
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Paper Abstract
Phase object pattern analysis has shown the possibility of considerably increasing microscope spatial resolution. Experiments have revealed more than ten times resolution enhancement. Some phase object images inside an Airy disk are presented.
Paper Details
Date Published: 1 June 1992
PDF: 3 pages
Proc. SPIE 1673, Integrated Circuit Metrology, Inspection, and Process Control VI, (1 June 1992); doi: 10.1117/12.59838
Published in SPIE Proceedings Vol. 1673:
Integrated Circuit Metrology, Inspection, and Process Control VI
Michael T. Postek Jr., Editor(s)
PDF: 3 pages
Proc. SPIE 1673, Integrated Circuit Metrology, Inspection, and Process Control VI, (1 June 1992); doi: 10.1117/12.59838
Show Author Affiliations
Vladimir P. Tychinsky, Moscow Institute for Radioengineering, Electronics, and Automation (Russia)
Alexander V. Tavrov, Moscow Institute for Radioengineering, Electronics, and Automation (Russia)
Published in SPIE Proceedings Vol. 1673:
Integrated Circuit Metrology, Inspection, and Process Control VI
Michael T. Postek Jr., Editor(s)
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