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Proceedings Paper

Design of PACs for high-performance photoresists (I): role of di-esterified PACs having hindered -OH groups
Author(s): Ryotaro Hanawa; Yasunori Uetani; Makoto Hanabata
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Paper Abstract

Steric hindrance on a ballast molecule causes selective esterification of -OH groups and provides novel di-esterified PACs having -OH group(s) with high selectivity. These novel PACs give photoresists higher sensitivities, (gamma) -values and resolutions, than those of fully esterified PACs. Also, these novel PACs provide scum-free patterns. Comparison of dissolution properties of a novel di-esterified PAC having a sterically hindered -OH with those of a di-esterified PAC suggests that the presence of -OH enhances dissolution rates, but it does not change the slope of logR-logE plots. DRM's agitated development reduces a large (gamma) -value of a novel PAC observed in puddle development. On the other hand, (gamma) -values of fully esterified PACs were not affected by the change of development methods. This observation suggests significance of (gamma) - value evaluation by puddle development for the investigation of high performance PACs.

Paper Details

Date Published: 1 June 1992
PDF: 11 pages
Proc. SPIE 1672, Advances in Resist Technology and Processing IX, (1 June 1992); doi: 10.1117/12.59733
Show Author Affiliations
Ryotaro Hanawa, Sumitomo Chemical Co., Ltd. (Japan)
Yasunori Uetani, Sumitomo Chemical Co., Ltd. (Japan)
Makoto Hanabata, Sumitomo Chemical Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 1672:
Advances in Resist Technology and Processing IX
Anthony E. Novembre, Editor(s)

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