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Proceedings Paper

Optimized capacitive MEMS microphone for photoacoustic spectroscopy (PAS) applications
Author(s): Michael Pedersen; John McClelland
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Paper Abstract

The design of a miniature capacitive microphone is discussed with specific application to photoacoustic instrumentation. It is demonstrated that a microphone design optimized for use in PAS can provide significant improvements in performance, with positive implications on the overall system performance. Furthermore, it is shown that MEMS-based microphone technology allows for important improvements in microphone vibration sensitivity, size, cost and ruggedness with direct application to portable PAS systems.

Paper Details

Date Published: 25 March 2005
PDF: 14 pages
Proc. SPIE 5732, Quantum Sensing and Nanophotonic Devices II, (25 March 2005); doi: 10.1117/12.597136
Show Author Affiliations
Michael Pedersen, Novusonic Corp. (United States)
John McClelland, MTEC Photoacoustics, Inc. (United States)

Published in SPIE Proceedings Vol. 5732:
Quantum Sensing and Nanophotonic Devices II
Manijeh Razeghi; Gail J. Brown, Editor(s)

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