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Proceedings Paper

Surface profiler for fixed through-glass measurement
Author(s): Sen Han; Erik Novak; John Wissinger; Bryan W. Guenther; Trisha Browne; Emilio Yanine; Michael Schurig; J. D. Herron; Christy McCloy; Xueyuan Li; Michael B. Krell; Jim Harris
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Paper Abstract

An interferometric surface profiler for high-magnification fixed through glass measurement (patent pending), such as for a packaged MEMS or MOEMS measurement, is described in this paper. Three techniques are introduced into the profiler, including aberration correction and long working distance for the objective, substantially shaped illumination and dispersive compensation. Measurement results illuminate that the data of the through glass objective are very close to those of the standard objective.

Paper Details

Date Published: 22 January 2005
PDF: 9 pages
Proc. SPIE 5716, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV, (22 January 2005); doi: 10.1117/12.597080
Show Author Affiliations
Sen Han, Veeco Instruments (United States)
Erik Novak, Veeco Instruments (United States)
John Wissinger, Veeco Instruments (United States)
Bryan W. Guenther, Veeco Instruments (United States)
Trisha Browne, Veeco Instruments (United States)
Emilio Yanine, Veeco Instruments (United States)
Michael Schurig, Veeco Instruments (United States)
J. D. Herron, Veeco Instruments (United States)
Christy McCloy, Veeco Instruments (United States)
Xueyuan Li, Veeco Instruments (United States)
Michael B. Krell, Veeco Instruments (United States)
Jim Harris, Veeco Instruments (United States)

Published in SPIE Proceedings Vol. 5716:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
Danelle M. Tanner; Rajeshuni Ramesham, Editor(s)

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