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Proceedings Paper

Fabrication of microspike-arrays on tungsten surface using femtosecond laser
Author(s): Tomokazu Sano; Masato Yanai; Etsuji Ohmura; Yasumitsu Nomura; Isamu Miyamoto; Akio Hirose; Kojiro F. Kobayashi
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Paper Abstract

Microspike-arrays were fabricated by irradiating a femtosecond laser on a tungsten surface through a mask opening in air. Natural logarithm of the calculated intensity distributions diffracted at the edge of the mask opening was qualitatively consistent with the experimental results of the shape and arrays of microspikes fabricated. The shape and the array of microspikes depend on the intensity distribution diffracted at the edge of the mask opening. This microspike-array has a potential to be micro emitter tips.

Paper Details

Date Published: 8 October 2004
PDF: 6 pages
Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); doi: 10.1117/12.596777
Show Author Affiliations
Tomokazu Sano, Osaka Univ. (Japan)
Masato Yanai, Osaka Univ. (Japan)
Etsuji Ohmura, Osaka Univ. (Japan)
Yasumitsu Nomura, Osaka Univ. (Japan)
Isamu Miyamoto, Osaka Univ. (Japan)
Akio Hirose, Osaka Univ. (Japan)
Kojiro F. Kobayashi, Osaka Univ. (Japan)

Published in SPIE Proceedings Vol. 5662:
Fifth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Henry Helvajian; Kazuyoshi Itoh; Kojiro F. Kobayashi; Andreas Ostendorf; Koji Sugioka, Editor(s)

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