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Proceedings Paper

Generation of nanosized materials by processing of thin film by interfering femtosecond laser beams
Author(s): Yoshiki Nakata; Tatsuo Okada; Mitsuo Maeda
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Paper Abstract

Nano-sized materials such as nanobump, nanomesh, nanobelt were generated by thin film processing using interfering femtosecond laser beams. To split and interfere femtosecond laser, a demagnification system, with a cylindrical lens in some case, was used. With four interfering femtosecond laser beams, a nanobump array was generated from a gold thin film in a single shot. It became larger and a bead was formed at a top of a bump as the fs laser fluence increased. Moreover, with three or two interfering femtosecond laser beams, ellipsoidal or linear nanobump array was generated. As an application of nanobump array, field emission from a nanobump array was demonstrated for the first time. On the other hand, with higher fluence and four beams, nanohole array was generated, and nanomesh was also generated from nanohole array by scratching. Grating was also generated with two beams, and nanobelt was generated from grating by scratching. Bimetallic nanobelt was generated from multi-layered thin film.

Paper Details

Date Published: 8 October 2004
PDF: 6 pages
Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); doi: 10.1117/12.596774
Show Author Affiliations
Yoshiki Nakata, Kyushu Univ. (Japan)
Tatsuo Okada, Kyushu Univ. (Japan)
Mitsuo Maeda, Kyushu Univ. (Japan)

Published in SPIE Proceedings Vol. 5662:
Fifth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Henry Helvajian; Kazuyoshi Itoh; Kojiro F. Kobayashi; Andreas Ostendorf; Koji Sugioka, Editor(s)

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