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Proceedings Paper

Toward nanostructuring with femtosecond laser pulses
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Paper Abstract

Micro- and nanostructuring are very important for the fabrication of new materials and multifunctional devices. Existing photo-lithographic technologies can only be applied to a limited number of materials and used on plane surfaces. Whereas, microstructuring with femtosecond laser pulses has established itself as an excellent and universal tool for micro-processing, it is still unclear what are the limits of this technology. It is of great interest to use this technique also for nanostructuring. With tightly focused femtosecond laser pulses one can produce sub-micrometer holes and structures whose quality depends on the material. We present new results on nanostructuring of different materials with femtosecond laser pulses in an attempt to make this an universal technology, and discuss its reproducibility, and further prospects for quality control.

Paper Details

Date Published: 8 October 2004
PDF: 6 pages
Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); doi: 10.1117/12.596773
Show Author Affiliations
Juergen Koch, Laser Zentrum Hannover e.V. (Germany)
Takasumi Tanabe, Keio Univ. (Japan)
Frank Korte, Laser Zentrum Hannover e.V. (Germany)
Carsten Fallnich, Laser Zentrum Hannover e.V. (Germany)
Andreas Ostendorf, Laser Zentrum Hannover e.V. (Germany)
Boris N. Chichkov, Laser Zentrum Hannover e.V. (Germany)

Published in SPIE Proceedings Vol. 5662:
Fifth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Henry Helvajian; Kazuyoshi Itoh; Kojiro F. Kobayashi; Andreas Ostendorf; Koji Sugioka, Editor(s)

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