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Proceedings Paper

A simple method to monitor the beam flux of neutral free radicals produced by photo-deionization of negative ion beams
Author(s): Keiji Hayashi; Takuo Kanayama; Takashi Oseki; Noriyoshi Omote
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Paper Abstract

Ion-current difference measurement by light intensity modulation (ICD) is introduced as a convenient method to determine the number flux of netural free radicals produced by photo-deionization of a negative ion beam for the purpose of surface-reaction-selective device processing. The ICD setup developed in this study exhibited the high precision and the high sensitivity under the experimental condition that the beam kinetic energy of the neutral free radicals was higher than 10 keV.

Paper Details

Date Published: 8 October 2004
PDF: 4 pages
Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004);
Show Author Affiliations
Keiji Hayashi, Kanazawa Institute of Technology (Japan)
Takuo Kanayama, Kanazawa Institute of Technology (Japan)
Takashi Oseki, Kanazawa Institute of Technology (Japan)
Noriyoshi Omote, Kanazawa Institute of Technology (Japan)


Published in SPIE Proceedings Vol. 5662:
Fifth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Henry Helvajian; Kazuyoshi Itoh; Kojiro F. Kobayashi; Andreas Ostendorf; Koji Sugioka, Editor(s)

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