Share Email Print

Proceedings Paper

Surface reactions responsible for atmosphere-sensitive characteristics of alternate-supply OMVPE growth of ZnSe
Author(s): Takuo Kanayama; Noriyoshi Omote; Satoshi Kajimoto; Keiji Hayashi
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

An insight into surface chemical reactions responsible for organometallic vapor phase epitaxial growth of ZnSe under alternate supply of diethylzinc and dimethylselenium was provided by findings in laser-assisted free-radical doping experiments. Based on ab initio molecular orbital analyses, atmosphere-sensitive characteristics of the ZnSe growth were attributed to differences in the pathways and the corresponding adiabatic potential barriers between diethylzinc chemisorption onto hydrogen- and methyl-terminated Se-stabilized ZnSe surfaces.

Paper Details

Date Published: 8 October 2004
PDF: 4 pages
Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); doi: 10.1117/12.596391
Show Author Affiliations
Takuo Kanayama, Kanazawa Institute of Technology (Japan)
Noriyoshi Omote, Kanazawa Institute of Technology (Japan)
Satoshi Kajimoto, Kanazawa Institute of Technology (Japan)
Keiji Hayashi, Kanazawa Institute of Technology (Japan)

Published in SPIE Proceedings Vol. 5662:
Fifth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Henry Helvajian; Kazuyoshi Itoh; Kojiro F. Kobayashi; Andreas Ostendorf; Koji Sugioka, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?