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Proceedings Paper

Micro-machining using 1.55µm band fiber pulse laser with 10kW peak power
Author(s): Junya Maeda; Hisashi Sawada; Minoru Yoshida; Moriyuki Fujita
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Paper Abstract

It is reported on micro-machining using as a laser source, a high peak power fiber pulse laser, MITSUBISHI CABLE'S LP155R that consists of a two stage erbium doped fiber amplifier (EDFA) designed specialty for pulse amplification. The output of the fiber laser is a transversal single mode and its wavelength is 1.55 μm. The peak power and the pulse width of FWHM in our catalogued products are 10 kW and 2 ns respectively. A laser source having preliminary specification of 2 kW and 80 ps is also used. The high peak power and short pulse created in these systems make precise micro-machining possible with little thermal damages around the processed regions. It is demonstrated that microdrilling and microscribing of metals and crystals such as tungsten, diamond-like-carbon (DLC) coating, stainless steel 304, silicon, sapphire and lithium-niobate. The microstructures of the processed specimens observed by a scanning electron microscope and an optical microscope are also introduced in this paper.

Paper Details

Date Published: 8 October 2004
PDF: 6 pages
Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); doi: 10.1117/12.596380
Show Author Affiliations
Junya Maeda, Mitsubishi Cable Industries, Ltd. (Japan)
Hisashi Sawada, Mitsubishi Cable Industries, Ltd. (Japan)
Minoru Yoshida, Mitsubishi Cable Industries, Ltd. (Japan)
Moriyuki Fujita, Mitsubishi Cable Industries, Ltd. (Japan)

Published in SPIE Proceedings Vol. 5662:
Fifth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Henry Helvajian; Kazuyoshi Itoh; Kojiro F. Kobayashi; Andreas Ostendorf; Koji Sugioka, Editor(s)

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