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Proceedings Paper

Formation of subwavelength-laser-induced periodic surface structures by tightly focused femtosecond laser radiation
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Paper Abstract

Sub-wavelength (1/4*λ-3/4*λ) laser induced periodic surface structures are generated by irradiation of either bulk fused silica and silicon or Er:BaTiO3 thin films by scanning a tightly focused beam (Θ = 1 μm) of femtosecond laser radiation (λ = 800 nm, tp = 100 fs) on the surface. The ripple pattern extends coherently over many overlapping laser pulses parallel and perpendicular to the polarization of the laser radiation. The dependence of the ripple spacing on the spacing of successive pulses, the direction of polarization and the properties of the material is investigated. The evolution of the ripples is investigated by applying pulse bursts with 1 - 20 pulses. The development conditions of the stuctures are specified and possible mechanisms of ripple growth are discussed.

Paper Details

Date Published: 8 October 2004
PDF: 5 pages
Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004);
Show Author Affiliations
Ralph Wagner, RWTH-Aachen (Germany)
Jens Gottmann, RWTH-Aachen (Germany)
Alexander Horn, RWTH-Aachen (Germany)
Ernst Wolfgang Kreutz, RWTH-Aachen (Germany)

Published in SPIE Proceedings Vol. 5662:
Fifth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Henry Helvajian; Kazuyoshi Itoh; Kojiro F. Kobayashi; Andreas Ostendorf; Koji Sugioka, Editor(s)

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