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Proceedings Paper

Latching shock sensors for health monitoring and quality control
Author(s): Michael R. Whitley; Michael S. Kranz; Roy Kesmodel; Sherrie J. Burgett
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Paper Abstract

The ability to monitor shock level is important for missile health monitoring to predict the performance after storage and eliminate potentially damaged units. Shock sensing is also of interest for monitoring the handling conditions of fragile shipments and providing a measure of unit-level quality control not currently available. A MEMS bi-polar single axis latching shock sensor has been developed with the goal of monitoring shock events and with the potential to "wake up" other sensing circuitry after a shock event occurs. An important feature of the sensor is that power is only consumed when a shock event occurs, making it suitable for long-term remote monitoring applications. The shock sensor has been designed, fabricated and characterized. High volume, low unit cost production will be enabled through the use of standard MEMS fabrication technologies such as DRIE and SOI wafer processing.

Paper Details

Date Published: 22 January 2005
PDF: 10 pages
Proc. SPIE 5717, MEMS/MOEMS Components and Their Applications II, (22 January 2005); doi: 10.1117/12.593348
Show Author Affiliations
Michael R. Whitley, Morgan Research Corp. (United States)
Michael S. Kranz, Morgan Research Corp. (United States)
Roy Kesmodel, Morgan Research Corp. (United States)
Sherrie J. Burgett, U.S. Army Aviation and Missile Command (United States)

Published in SPIE Proceedings Vol. 5717:
MEMS/MOEMS Components and Their Applications II
Albert K. Henning, Editor(s)

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