Share Email Print

Proceedings Paper

Polymer-based micro-deformable mirror for adaptive optics applications
Author(s): Frederic Zamkotsian; Veronique Conedera; Arnaud Liotard; Andreas Schroeder; Norbert Fabre; Henri Camon; Patrick Lanzoni
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Next generation giant telescopes as well as next generation instrumentation for 10m-class telescopes relies on the availability of highly performing adaptive optical systems, for studying new fields like circumstellar disks and extrasolar planets. These systems require deformable mirrors with very challenging parameters, including number of actuators up to 250 000 and inter-actuator spacing around 500μm. MOEMS-based devices are promising for future deformable mirrors. However, only limited strokes for large driving voltages have been demonstrated. In order to overcome these limitations, we are currently developing a micro-deformable mirror based on an array of electrostatic actuators with attachment posts to a continuous mirror on top. The originality of our approach lies in the elaboration of a sacrificial layer and of a structural layer made of polymer materials, using low-temperature process. This process allows the realization of high optical quality mirrors on top of an actuator array made with various techniques. We have developed the first polymer piston-motion actuator in order to reach high strokes for low driving voltages: a 10μm thick mobile plate with four springs attached to the substrate, and with an air gap of 10μm exhibits a piston motion of 2μm for 30V. Preliminary comparison with FEM models show very good agreement and design of a complete polymer-based MDM looks possible.

Paper Details

Date Published: 22 January 2005
PDF: 11 pages
Proc. SPIE 5719, MOEMS and Miniaturized Systems V, (22 January 2005); doi: 10.1117/12.592422
Show Author Affiliations
Frederic Zamkotsian, Lab. d'Astrophysique de Marseille (France)
Veronique Conedera, Lab. d'Analyse et d'Architecture des Systems, CNRS (France)
Arnaud Liotard, Lab. d'Astrophysique de Marseille (France)
Andreas Schroeder, Lab. d'Analyse et d'Architecture des Systems, CNRS (France)
Norbert Fabre, Lab. d'Analyse et d'Architecture des Systems, CNRS (France)
Henri Camon, Lab. d'Analyse et d'Architecture des Systems, CNRS (France)
Patrick Lanzoni, Lab. d'Astrophysique de Marseille (France)

Published in SPIE Proceedings Vol. 5719:
MOEMS and Miniaturized Systems V
Ayman El-Fatatry, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?