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Proceedings Paper

Fabrication of cantilever probes with integrated piezoresistive read-out and built-in piezoelectric actuators
Author(s): Steve Olson; Bruce Altemus; Balasubramanian Sankaran; Natalya Tokranova; Robert Geer; James Castracane; Bai Xu
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Paper Abstract

Micromachined cantilevers used as force probes in atomic force microscopy are extremely sensitive to a variety of environment factors such as acoustic noise, temperature and humidity. This unwanted interference can be exploited to produce highly sensitive systems with proper design and under precise conditions. In this paper, we report the development of a new generic process for the fabrication of a microprobe with integrated piezoresistive read-out and built-in piezoelectric actuators. The mechanical performance of cantilever probes of various dimensions was studied. The result from the Finite Element Analysis (FEA) was compared to the experimental results. Application of this probe in a nondestructive, general-purpose, near-field nanomechanical imaging system will be discussed.

Paper Details

Date Published: 22 January 2005
PDF: 8 pages
Proc. SPIE 5717, MEMS/MOEMS Components and Their Applications II, (22 January 2005); doi: 10.1117/12.591024
Show Author Affiliations
Steve Olson, Univ. at Albany/SUNY (United States)
Bruce Altemus, Univ. at Albany/SUNY (United States)
Balasubramanian Sankaran, Univ. at Albany/SUNY (United States)
Natalya Tokranova, Univ. at Albany/SUNY (United States)
Robert Geer, Univ. at Albany/SUNY (United States)
James Castracane, Univ. at Albany/SUNY (United States)
Bai Xu, Univ. at Albany/SUNY (United States)

Published in SPIE Proceedings Vol. 5717:
MEMS/MOEMS Components and Their Applications II
Albert K. Henning, Editor(s)

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