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Proceedings Paper

Fabrication and properties of F-doped silica glasses via sol-gel technique
Author(s): Ken C. Cheng; Yuhuan Xu; Peter Sheu
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Paper Abstract

Ultra low OH, fluorine-doped silica glasses have been successfully synthesized via sol-gel technique. The maximum relative refractive index difference to pure silica of -1.0% is obtained. Characterization of various levels of fluorine-doped silica glasses was performed by measuring vacuum ultraviolet spectra. Fluorine concentration in silica glasses strongly depends on the gel formulation, and sintering conditions. We have developed VUV/DUV transmission optical materials in various geometries, such as plates, tubes and discs. Transmission more than 80% at 157 nm is achieved with various F-doping levels silica glasses for 6.35 mm thickness.

Paper Details

Date Published: 6 December 2004
PDF: 10 pages
Proc. SPIE 5567, 24th Annual BACUS Symposium on Photomask Technology, (6 December 2004);
Show Author Affiliations
Ken C. Cheng, Simax Technologies Inc. (United States)
Yuhuan Xu, Simax Technologies Inc. (United States)
Peter Sheu, Simax Technologies Inc. (United States)

Published in SPIE Proceedings Vol. 5567:
24th Annual BACUS Symposium on Photomask Technology
Wolfgang Staud; J. Tracy Weed, Editor(s)

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