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Proceedings Paper

Control of MEMS-based actuator array for micro smart systems
Author(s): Yves-Andre Chapuis; Yamato Fukuta; Lingfei Zhou; Yoshio Mita; Hiroyuki Fujita
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Paper Abstract

In the present work, the authors were focused on control modes used in distributed microsystems. Especially, they studied distributed manipulation like motion active surface that have been an important topic in micro and nanofabrication field. After comparing advantages and drawbacks between centralized, decentralized and distributed control systems, they decided to apply the control mode to an airflow active surface based on pneumatic microactuator array, and fabricated by MEMS technology. The size of the device is about 35x35 mm2 for 560 MEMS-based actuators and holes respectively at the front- and the back-side of the silicon substrate. In a first approach, and to overcome fabrication problems of the micro-smart system, combining electronic and electro mechanic elements, a co-design software/hardware solution was implemented. By this way, and using a digital image captured from a CCD camera, autonomy of the distributed microsystems could be developed. Afterward, a feedback control strategy was elaborated by applying principles of autonomous mobile robots that lend it to. A first prototype, validating all control mode principles was successfully implemented directly in software. Experiment results demonstrated advantages and good performances of the method.

Paper Details

Date Published: 23 February 2005
PDF: 11 pages
Proc. SPIE 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, (23 February 2005); doi: 10.1117/12.582866
Show Author Affiliations
Yves-Andre Chapuis, LIMMS/CNRS (France)
LEPSI/IN2P3, CNRS, Univ. Louis Pasteur de Strasbourg (France)
Yamato Fukuta, CIRMM-IIS, Univ. of Tokyo (Japan)
Lingfei Zhou, LEPSI/IN2P3, CNRS, Univ. Louis Pasteur de Strasbourg (France)
Yoshio Mita, Univ. of Tokyo (Japan)
Hiroyuki Fujita, CIRMMS-IIS, Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 5650:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
Jung-Chih Chiao; David N. Jamieson; Lorenzo Faraone; Andrew S. Dzurak, Editor(s)

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