Share Email Print

Proceedings Paper

Ablation plume movement in a pulsed laser deposition system
Author(s): Aurelian Marcu; Constantin Grigoriu; V. Cristea; Kiyoshi Yatsui
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

A novel three-dimensional model has been proposed for simulating pulsed laser ablation plume behvior and 'micron-sized particles' movement. It describes the plume expansion in vacuum or into an environmental gas. The model combined the advantages of Monte-Carlo and Finite Element methods, being able to give a detailed image of particles behavior, both from microscopic and macroscopic points of view. The particle interaction with obstacles is aimed to provide us a more comprehensive understanding of Pulsed Laser Deposition (PLD) techniques, with the final objective of obtaining droplets-free surfaces.

Paper Details

Date Published: 21 October 2004
PDF: 7 pages
Proc. SPIE 5581, ROMOPTO 2003: Seventh Conference on Optics, (21 October 2004); doi: 10.1117/12.582833
Show Author Affiliations
Aurelian Marcu, National Institute for Laser, Plasma, and Radiation Physics (Romania)
Constantin Grigoriu, National Institute for Laser, Plasma, and Radiation Physics (Romania)
V. Cristea, Univ. Politehnica Bucaresti (Romania)
Kiyoshi Yatsui, Nagaoka Univ. of Technology (Japan)

Published in SPIE Proceedings Vol. 5581:
ROMOPTO 2003: Seventh Conference on Optics
Valentin I. Vlad, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?