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Proceedings Paper

Pulsed electron beam ablation of ferroelectric materials: spectroscopic investigation
Author(s): M. Nistor; F. Gherendi; M. Magureanu; N. B. Mandache; Andrei Ioachim; G. Banciu; D. Dumitriu
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Paper Abstract

A compact pulsed electron beam source based on a channel-spark discharge was studied with the aim to find the optimum operating conditions for an efficient ablation of ferroelectric materials for thin-film deposition. The ablation plasma was studied by time-resolved optical emission spectroscopy. The temporal evolution of the spectral lines of target material and working gas was monitored. In the present discharge configuration a long lasting plasma is characteristic, as proved by the temporal evolution of excited atoms and ions.

Paper Details

Date Published: 21 October 2004
PDF: 6 pages
Proc. SPIE 5581, ROMOPTO 2003: Seventh Conference on Optics, (21 October 2004); doi: 10.1117/12.582814
Show Author Affiliations
M. Nistor, National Institute for Laser, Plasma, and Radiation Physics (Romania)
F. Gherendi, National Institute for Laser, Plasma, and Radiation Physics (Romania)
M. Magureanu, National Institute for Laser, Plasma, and Radiation Physics (Romania)
N. B. Mandache, National Institute for Laser, Plasma, and Radiation Physics (Romania)
Andrei Ioachim, National Institute of Materials Physics (Romania)
G. Banciu, National Institute of Materials Physics (Romania)
D. Dumitriu, National Institute for Physics and Nuclear Engineering (Romania)


Published in SPIE Proceedings Vol. 5581:
ROMOPTO 2003: Seventh Conference on Optics
Valentin I. Vlad, Editor(s)

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