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Proceedings Paper

Mechano-micro/nano systems
Author(s): Mikio Horie
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Paper Abstract

In recent years, the researches about Micro/Nano Systems are down actively in the bio-medical research fields, DNA research fields, chemical analysis systems fields, etc. In the results, a new materials and new functions in the systems are developed. In this invited paper, Mechano-Micro/Nano Systems, especially, motion systems are introduced. First, the research activities concerning the Mechano-Micro/Nano Systems in the world(MST2003, MEMS2003 and MEMS2004) and in Japan(Researech Projects on Nanotechnology and Materials in Ministry of Education, Culture, Sports, Science and Technology) are shown. Secondary, my research activities are introduced. As my research activities, (1) a comb-drive static actuator for the motion convert mechanisms, (2) a micro-nano fabrication method by use of FAB(Fast Atom Beam) machines, (3) a micro optical mirror manipulator for inputs-outputs optical switches, (4) a miniature pantograph mechanism with large-deflective hinges and links made of plastics are discussed and their performances are explained.

Paper Details

Date Published: 25 October 2004
PDF: 12 pages
Proc. SPIE 5604, Optomechatronic Micro/Nano Components, Devices, and Systems, (25 October 2004); doi: 10.1117/12.582751
Show Author Affiliations
Mikio Horie, Tokyo Institute of Technology (Japan)

Published in SPIE Proceedings Vol. 5604:
Optomechatronic Micro/Nano Components, Devices, and Systems
Yoshitada Katagiri, Editor(s)

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