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Proceedings Paper

Optical spectral properties of periodic micro- and nanostructures in Si and GaAs
Author(s): Shlomo Hava; Nathan Pinhas; Mark Auselender; Ari Cohen-Nov
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Paper Abstract

Periodic structures with minimum feature sizes in the scale of the mean radiation wavelength or less attract considerable interest due to the peculiarity of their electromagnetic (EM) response. When interference and diffraction effects become sufficiently strong, novel and interesting phenomena emerge in reflectivity, transmissivity, absorbance and even infrared thermal emission. The nanotechnology processing enables the production of high-efficiency diffraction gratings with quite small periods, down to the nanometer range, with aspect ratios higher than in spectroscopic gratings. In this paper we present the spectral measurements (transmission and thermal emission) of GaAs and silicon samples with lamella 1D gratings and mesa 2D structures. We also present the theoretical and simulation tools developed for the design and analysis of multilayer lamellar grating structures.

Paper Details

Date Published: 28 February 2005
PDF: 5 pages
Proc. SPIE 5649, Smart Structures, Devices, and Systems II, (28 February 2005); doi: 10.1117/12.582430
Show Author Affiliations
Shlomo Hava, Ben-Gurion Univ. of the Negev (Israel)
Nathan Pinhas, Ben-Gurion Univ. of the Negev (Israel)
Mark Auselender, Ben-Gurion Univ. of the Negev (Israel)
Ari Cohen-Nov, Gal-El (MMIC) (Israel)

Published in SPIE Proceedings Vol. 5649:
Smart Structures, Devices, and Systems II
Said F. Al-Sarawi, Editor(s)

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