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Proceedings Paper

Fabrication of an integrated microfluidic and surface acoustic wave device for fluid analysis
Author(s): David Anthony Karla; Anthony Stephen Holland; Gary Rosengarten; Kourosh Kalantar-Zadeh
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Paper Abstract

A technique is presented for the fabrication of an integrated microfluidic surface acoustic wave (SAW) sensor suitable for a wide range of fluidic analyses. The device was fabricated in Microchem SU8-25, on a PMMA substrate, employing a modified SU8 process. Standard SU8 procedures are sufficiently close to the glass transition temperature for PMMA to cause significant warping. PMMA is advantageous as a substrate material as it is cheap, easily machined, hydrophobic, and exhibits superior adhesion with SU8. A novel die bonding technique was explored to join the SU-8 fluidic structures to a lithium niobate SAW sensor. This involved additional fluidic structures, and the optical adhesive, NOA-73. A device with a 1cm by 1.5cm by 25um chamber was fabricated with these techniques, and was used to explore fundamental properties of flow at the microscale, in particular at the surface of the SAW device.

Paper Details

Date Published: 23 February 2005
PDF: 11 pages
Proc. SPIE 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, (23 February 2005); doi: 10.1117/12.582281
Show Author Affiliations
David Anthony Karla, RMIT Univ. (Australia)
Anthony Stephen Holland, RMIT Univ. (Australia)
Gary Rosengarten, Univ. of Melbourne (Australia)
Kourosh Kalantar-Zadeh, RMIT Univ. (Australia)

Published in SPIE Proceedings Vol. 5650:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
Jung-Chih Chiao; David N. Jamieson; Lorenzo Faraone; Andrew S. Dzurak, Editor(s)

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