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Proceedings Paper

Investigation of layered SAW sensors based on a WO3/ZnO/64° YX LiNbO3 structure with gold catalytic layer
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Paper Abstract

A layered Surface Acoustic Wave (SAW) hydrogen gas sensor, based on a delay line structure with 64 finger pairs on input and output port, is fabricated on 64° Y-cut, X-propagating LiNbO3 substrate. A guiding layer of ZnO is used to increase the sensitivity of the structure. A WO3 selective layer is employed to H2 gas sensing applications at different operating temperatures between room temperature and 300°C. In this paper, the fabrication process of WO3/ZnO/64° YX LiNbO3 sensor is described and the sensor’s response features are analyzed. The improvement of the response with the addition of a gold catalytic layer on the sensor surface is also investigated.

Paper Details

Date Published: 23 February 2005
PDF: 9 pages
Proc. SPIE 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, (23 February 2005); doi: 10.1117/12.582222
Show Author Affiliations
Vijay Prasad Sivan, RMIT Univ. (Australia)
Samuel James Ippolito, RMIT Univ. (Australia)
CRC for microTechnology (Australia)
Sasikaran Kandasamy, RMIT Univ. (Australia)
Kourosh Kalantar-Zadeh, RMIT Univ. (Australia)
Wojtek Wlodarski, RMIT Univ. (Australia)
CRC for microTechnology (Australia)
Anthony Stephen Holland, RMIT Univ. (Australia)

Published in SPIE Proceedings Vol. 5650:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
Jung-Chih Chiao; David N. Jamieson; Lorenzo Faraone; Andrew S. Dzurak, Editor(s)

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