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Proceedings Paper

Atomic-force-regulated near-field scanning optical microscope
Author(s): Ricardo Toledo-Crow; Yue Chen; Mehdi Vaez-Iravani
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Paper Abstract

The design and theory of operation of a new form of near field scanning optical microscope are presented. In this system, the tip/sample distance regulation is achieved in a feedback system utilizing the topography information derived from the attractive force sensed between the tip and the sample. The technique affords the possibility of correlative microscopy. Results are presented on imaging blood smears and thin film integrated circuits.

Paper Details

Date Published: 1 May 1992
PDF: 10 pages
Proc. SPIE 1639, Scanning Probe Microscopies, (1 May 1992); doi: 10.1117/12.58192
Show Author Affiliations
Ricardo Toledo-Crow, Rochester Institute of Technology (United States)
Yue Chen, Rochester Institute of Technology (United States)
Mehdi Vaez-Iravani, Rochester Institute of Technology (United States)

Published in SPIE Proceedings Vol. 1639:
Scanning Probe Microscopies
Srinivas Manne, Editor(s)

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