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Proceedings Paper

Designing the micro opto mechanical vibration sensor
Author(s): Michal Borecki; Jerzy Kruszewski
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Paper Abstract

The work is related to the design of vibration sensor's head represented by MOEMS structure. The head consists of two optical fibers and micro beam that lays between them. The principle of operation of the head is free space light modulation by micro beam. The elaborated head model enables analysis of influence of head and stimulation parameters on measured output light. The main parameters of the head are material used for micro beam fabrication and beam dimensions. The micro beam can be fabricated monolithically or as added component so it can be made from silicon or glass. The micro beam types qualify the sensor type as amplitude or frequency transformer. These head types require different types of detection block. What is interesting, technologically simpler frequency transformer requires more complex detection device than amplitude transformer.

Paper Details

Date Published: 8 September 2004
PDF: 5 pages
Proc. SPIE 5576, Lightguides and their Applications II, (8 September 2004); doi: 10.1117/12.581736
Show Author Affiliations
Michal Borecki, Warsaw Univ. of Technology (Poland)
Jerzy Kruszewski, Warsaw Univ. of Technology (Poland)

Published in SPIE Proceedings Vol. 5576:
Lightguides and their Applications II
Jan Wojcik; Waldemar Wojcik, Editor(s)

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